- Title
- Modeling and noise analysis of a microcantilever-based mass sensor
- Creator
- Harcombe, David M.; Ruppert, Michael G.; Fleming, Andrew J.
- Relation
- 4th International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2019. Proceedings of MARSS 2019: 4th International Conference on Manipulation, Automation, and Robotics at Small Scales (Helsinki, Finland 01-05 July, 2019)
- Publisher Link
- http://dx.doi.org/10.1109/MARSS.2019.8860982
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2019
- Description
- Nanomechanical devices have the potential for practical applications as mass sensors. In microcantilever-based sensing, resonance frequency shifts are tracked by a phase-locked loop (PLL) in-order to monitor mass adsorption. A major challenge in minimizing the mass detection limit comes from the noise present in the system due to thermal, sensor and oscillator noise. There is numerical difficulty in simulating PLLs, as both low frequency phase estimates and high frequency mixing products need to be captured resulting in a stiff problem. By using linear system-theoretic modeling an in-depth analysis of the system is able to be conducted overcoming this issue. This provides insight into individual noise source propagation, dominant noise sources and possible ways to reduce their effects. The developed model is verified in simulation against the non-linear PLL, with each achieving low picogram sensitivity for a 100 Hz loop bandwidth and realistically modeled noise sources.
- Subject
- nanomechanical devices; mass sensors; oscillator noise; noise
- Identifier
- http://hdl.handle.net/1959.13/1460176
- Identifier
- uon:45887
- Identifier
- ISBN:9781728109473
- Language
- eng
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